High Dynamic Range AFM Cantilever With a Collocated Piezoelectric Actuator-Sensor Pair
Author:
Funder
U.S. Department of Energy
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://ieeexplore.ieee.org/ielam/84/9055245/8982193-aam.pdf
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