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Offset Suppression in a Micromachined Lorentz Force Magnetic Sensor by Current Chopping

  • Published:2014-12 Issue:6 Volume:23 Page:1477-1484
  • ISSN:1057-7157
  • Container-title:Journal of Microelectromechanical Systems
  • language:
  • Short-container-title:J. Microelectromech. Syst.

Author:

Mo Li ,Horsley David A.

Funder

National Science Foundation

Defense Advanced Research Projects Agency Precision Navigation and Timing Program through Dr. A. Shkel and Dr. R. Lutwak

National Science Foundation through the National Nanotechnology Infrastructure Network

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers;Microsystems & Nanoengineering;2022-09-16

2. A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation;Sensors;2020-10-19

3. A Mixed-Signal Control System for Lorentz-Force Resonant MEMS Magnetometers;IEEE Sensors Journal;2019-09-01

4. An Electromagnetic Induction Based Torsional MEMS Magnetometer for In-Plane Magnetic Field Sensing;2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII);2019-06

5. The Construction of a Graphene Hall Effect Magnetometer;IEEE Sensors Journal;2018-12-01
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