Funder
μSIC
Ministry of Education, Culture, Sports, Science, and Technology through the Program for Leading Graduate Schools, Inter-Graduate School Doctoral Degree Program on Global Safety
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Cited by
13 articles.
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1. Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
2. Varifocal MEMS mirrors for high-speed axial focus scanning: a review;Microsystems & Nanoengineering;2023-10-27
3. アフィリエイト通信;Journal of the Japan Society for Precision Engineering;2023-07-05
4. Piezoelectrically Actuated Micromirror with Dynamic Deformation Compensation Mechanism;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
5. Miniature Deformable MEMS Mirrors for Ultrafast Optical Focusing;Micromachines;2022-12-24