A Fast-Switching (1.35- $\mu \text{s}$ ) Low-Control-Voltage (2.5-V) MEMS T/R Switch Monolithically Integrated With a Capacitive Micromachined Ultrasonic Transducer-Reference-Cited by-同舟云学术

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A Fast-Switching (1.35- $\mu \text{s}$ ) Low-Control-Voltage (2.5-V) MEMS T/R Switch Monolithically Integrated With a Capacitive Micromachined Ultrasonic Transducer

Published:2018-04 Issue:2 Volume:27 Page:190-200
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Zhang Xiao^ORCID,Adelegan Oluwafemi Joel^ORCID,Yamaner Feysel Yalcin,Oralkan Omer^ORCID

Funder

National Institutes of Health

National Science Foundation as part of the National Nanotechnology Coordinated Infrastructure

State of North Carolina

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://ieeexplore.ieee.org/ielaam/84/8329249/8253806-aam.pdf

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Performance optimization of the cantilever-based MEMS switch;ST PETER POLY U J-PH;2022

2. Migration of adhesive material in electrostatically actuated MEMS switch;Microelectronics Reliability;2021-10

3. Calculation of Performance of MEMS-Switch with Increased Capacitance Ratio;Russian Microelectronics;2020-07

4. Microelectromechanical Systems Cantilever Resonators: Pressure-Dependent Gas Film Damping;Journal of Dynamic Systems, Measurement, and Control;2020-05-11

5. Stiction-protected MEMS switch with low actuation voltage;Microsystem Technologies;2018-10-17

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