Funder
National Center for Science and Engineering Statistics
Cornell NanoScale Science & Technology Facility
National Nanotechnology Coordinated Infrastructure
National Science Foundation
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Cited by
1 articles.
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1. Modeling of Beam Electrothermal Actuators;Journal of Microelectromechanical Systems;2020-12