Silicon Micromachined Device Testing by Infrared Low-Coherence Reflectometry-Reference-Cited by-同舟云学术

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Silicon Micromachined Device Testing by Infrared Low-Coherence Reflectometry

Published:2015-12 Issue:6 Volume:24 Page:1960-1964
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Carpignano Francesca,Surdo Salvatore,Barillaro Giuseppe,Merlo Sabina^ORCID

Funder

Fondazione Cariplo

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/7337473/07165600.pdf?arnumber=7165600

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