Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW-Reference-Cited by-同舟云学术

Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW

Published:2023-12 Issue:6 Volume:32 Page:622-625
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Barrera Omar¹^ORCID,Cho Sinwoo¹^ORCID,Matto Lezli²^ORCID,Kramer Jack¹^ORCID,Huynh Kenny²,Chulukhadze Vakhtang¹,Chang Yen-Wei¹,Goorsky Mark S.²^ORCID,Lu Ruochen¹^ORCID

Affiliation:

1. Electrical and Computer Engineering (ECE), The University of Texas at Austin, Austin, TX, USA

2. Materials Science and Engineering, University of California at Los Angeles, Los Angeles, CA, USA

Funder

DARPA COmpact Front-End Filters at the ElEment-Level

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/10336244/10288383.pdf?arnumber=10288383

Reference29 articles.

1. High-Performance Acoustic Wave Devices on LiTaO₃/SiC Hetero-Substrates

2. 4.5 GHz Lithium Niobate MEMS Filters With 10% Fractional Bandwidth for 5G Front-Ends

3. Scaling Surface Acoustic Wave Filters on LNOI platform for 5G communication

4. 5 GHz Band n79 wideband microacoustic filter using thin lithium niobate membrane

5. Comparative Study of Acoustic Wave Devices Using Thin Piezoelectric Plates in the 3–5-GHz Range

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