Author:
Park Kwang Soon,Varel Cagdas,Hoo Ji Hao,Baskaran Rajashree,Bohringer Karl F.
Funder
Defense Advanced Research Projects Agency N/MEMS S&T Fundamentals Program
University of Washington Microfabrication/Nanotechnology User Facility
NSF National Nanotechnology Infrastructure Network
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Cited by
2 articles.
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