An Electrostatically Actuated Stacked-Electrode MEMS Relay With a Levering and Torsional Spring for Power Applications-Reference-Cited by-同舟云学术

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An Electrostatically Actuated Stacked-Electrode MEMS Relay With a Levering and Torsional Spring for Power Applications

Published:2012-10 Issue:5 Volume:21 Page:1209-1217
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Song Yong-Ha,Han Chang-Hoon,Kim Min-Wu,Lee Jeong Oen,Yoon Jun-Bo

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/6314482/06204199.pdf?arnumber=6204199

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 10-Amp Power-Mems Irreversible Toggle Switch with Drie-Etched Side-Wall Au Plating and Magnetic Actuation;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

2. Utilizing mechanical adhesion force as a high contact force in a MEMS relay;Sensors and Actuators A: Physical;2021-11

3. Migration of adhesive material in electrostatically actuated MEMS switch;Microelectronics Reliability;2021-10

4. Research Status and Development Trend of MEMS Switches: A Review;Micromachines;2020-07-17

5. Modeling and design of an ultra low-power NEMS relays: application to logic gate inverters;Analog Integrated Circuits and Signal Processing;2020-05-22

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