Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications
Author:
Affiliation:
1. State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin, China
Funder
National Key Research and Development Program
National Natural Science Foundation of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/10091961/10001825.pdf?arnumber=10001825
Reference26 articles.
1. An Aluminum-Nitride PMUT with Pre-Concaved Membrane for Large Deformation and High Quality-Factor Performance
2. Attenuation of Curved Structural Surfaces in PMUT Measurements
3. Increased Output-Pressure PMUTs with a Sloped Profile Fabricated via Surface Micromachining
4. LOW THERMAL BUDGET SURFACE MICROMACHINING PROCESS FOR PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER ARRAYS WITH IN-SITU VACUUM SEALED CAVITIES
5. Piezoelectric Micromachined Ultrasonic Transducer Array-Based Electronic Stethoscope for Internet of Medical Things
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Modeling and experimental studies of mutual acoustic radiation effect on PMUT array;Sensors and Actuators A: Physical;2024-10
2. Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers;Journal of Micromechanics and Microengineering;2024-08-08
3. Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films;Micromachines;2024-08-01
4. An Analytical Method for the Enhancement of Electromechanical Coupling of Piezoelectric Micromachined Ultrasonic Transducers Combined with Pre-Stress;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
5. Equidimensional Suspended Piezoelectric Micromachined Ultrasound Transducer Array with Various Mass Loads for High Ultrasound Sensitivity and Wide Bandwidth;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3