Differential Scanning Calorimeter Based on Suspended Membrane Single Crystal Silicon Microhotplate-Reference-Cited by-同舟云学术

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Differential Scanning Calorimeter Based on Suspended Membrane Single Crystal Silicon Microhotplate

Published:2008-12 Issue:6 Volume:17 Page:1513-1525
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Lee Jungchul,Spadaccini Christopher M.,Mukerjee Erik V.,King William P.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/4681904/04681916.pdf?arnumber=4681916

Cited by 26 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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