Active MEMS Valves for Flow Control in a High-Pressure Micro-Gas-Analyzer-Reference-Cited by-同舟云学术

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Active MEMS Valves for Flow Control in a High-Pressure Micro-Gas-Analyzer

Published:2011-10 Issue:5 Volume:20 Page:1150-1162
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Galambos Paul,Lantz Jeffrey,Baker Michael S.,McClain Jaime,Bogart Gregory R.,Simonson Robert Joseph

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/6031170/06007033.pdf?arnumber=6007033

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characterization of compressible flow through microscale orifice arrays;International Journal of Heat and Fluid Flow;2023-10

2. A Bistable Four-Working-States Electromagnetic Mini Valve Based on Flexible Magnets for Pneumatic Soft Actuators;IEEE Transactions on Industrial Electronics;2023

3. A Novel Piezoelectrically Driven Miniature Proportional Pneumatic Control Valve Utilizing a Microfabricated Orifice Array;IEEE/ASME Transactions on Mechatronics;2019-10

4. A Binder Jet Printed, Stainless Steel Preconcentrator as an In-Line Injector of Volatile Organic Compounds;Sensors;2019-06-19

5. An optimized microfabricated platform for the optical generation and detection of hyperpolarized 129Xe;Scientific Reports;2017-03-07

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