Stress-Driven and Carbon-Assisted Growth of $ \hbox{SiO}_{x}\hbox{N}_{y}$ Nanowires on Photoresist-Derived Carbon Microelectrode-Reference-Cited by-同舟云学术

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Stress-Driven and Carbon-Assisted Growth of $ \hbox{SiO}_{x}\hbox{N}_{y}$ Nanowires on Photoresist-Derived Carbon Microelectrode

Published:2012-12 Issue:6 Volume:21 Page:1445-1451
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Zhang Lei,Shi Tielin,Tang Zirong,Liu Dan,Xi Shuang

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/6362208/06294425.pdf?arnumber=6294425

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Integrated growth of Si-O-C nanosheets on the surface of carbon microstructure with the aid of carbon nanotubes;Revue des composites et des matériaux avancés;2018-06-30

2. Preparation of silicon-based nanowires through high-temperature annealing;Annales de chimie Science des Matériaux;2018-03-28

3. Pyrolyzed carbon with embedded NiO/Ni nanospheres for applications in microelectrodes;RSC Advances;2016

4. Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review;Journal of Micromechanics and Microengineering;2015-09-25

5. Carbon as a MEMS Material;Materials and Failures in MEMS and NEMS;2015-09-19

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