Tailoring Anchor Etching Profiles During MEMS Release Using Microfluidic Sheathed Flow
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Published:2014-08
Issue:4
Volume:23
Page:918-926
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ISSN:1057-7157
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Container-title:Journal of Microelectromechanical Systems
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language:
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Short-container-title:J. Microelectromech. Syst.
Author:
Cheah Ben C.,Dell John M.,Keating Adrian J.
Funder
Australian Postgraduate Award
University of Western Australia
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering