Study of Energy Loss Mechanisms in AlN-Based Piezoelectric Length Extensional-Mode Resonators-Reference-Cited by-同舟云学术

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Study of Energy Loss Mechanisms in AlN-Based Piezoelectric Length Extensional-Mode Resonators

Published:2019-08 Issue:4 Volume:28 Page:619-627
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Qamar Afzaal^ORCID,Sherrit Stewart,Zheng Xu-Qian,Lee Jaesung,Feng Philip X.-L.^ORCID,Rais-Zadeh Mina

Funder

Army Research Office

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/8782668/08708198.pdf?arnumber=8708198

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ultra-High Q Self-Ovenized AlScN-on-Si X-Lamé Resonator for Stable Clock Generation;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

2. Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator;Micromachines;2023-10-22

3. Five Low-Noise Stable Oscillators Referenced to the Same Multimode AlN/Si MEMS Resonator;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10

4. Theoretical and Experimental Analysis of the Spurious Modes and Quality Factors for Dual-Mode AlN Lamb-Wave Resonators;IEICE Transactions on Electronics;2023-03-01

5. Air Damping Effects on Different Modes of AlN-on-Si Microelectromechanical Resonators;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

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