Investigation and Optimization of Pirani Vacuum Gauges With Monocrystal Silicon Heaters and Heat Sinks-Reference-Cited by-同舟云学术

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Investigation and Optimization of Pirani Vacuum Gauges With Monocrystal Silicon Heaters and Heat Sinks

Published:2017-06 Issue:3 Volume:26 Page:601-608
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Zhang Le-Min,Jiao Bin-Bin^ORCID,Yun Shi-Chang,Kong Yan-Mei,Chen Da-Peng

Funder

National High Technology Research and Development Program of China (863 Program)

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/7936684/07888492.pdf?arnumber=7888492

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Efficient and Accurate System-Level Simulation Compatible Macromodel for MEMS Diode-Based Micro-Pirani Vacuum Sensor;IEEE Sensors Journal;2024-08-01

2. Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range;Journal of Micromechanics and Microengineering;2024-01-12

3. Ultrasensitive Reduced Vanadium Dioxide-Based MEMS Pirani Gauge with Extended Dynamic Range;Springer Proceedings in Physics;2024

4. Overview of the MEMS Pirani Sensors;Micromachines;2022-06-14

5. Reducing solid conduction in electrothermally driven MEMS Pirani gauge using integrated polymeric thin film;Applied Physics Letters;2022-02-21

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