An integrated BioMEMS fabrication technology-Reference-Cited by-同舟云学术

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An integrated BioMEMS fabrication technology

Published: Issue: Volume: Page:
ISSN:
Container-title:2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497)
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Author:

Gadre A.,Kastantin M.,Sheng Li ,Ghodssi R.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/7731/21224/00984471.pdf?arnumber=984471

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