Delamination in BEOL: Analysis of interface failure by combined experimental & modeling approaches-Reference-Cited by-同舟云学术

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Delamination in BEOL: Analysis of interface failure by combined experimental & modeling approaches

Published:2013-04 Issue: Volume: Page:
ISSN:
Container-title:2013 IEEE International Reliability Physics Symposium (IRPS)
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Author:

Debecker B.,Vanstreels K.,Gonzalez M.,Vandevelde B.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6523362/6531927/06532031.pdf?arnumber=6532031

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