FEM simulation of SAW H<sub>2</sub> gas sensor based on Pd/AlN/Si multilayer structure-Reference-Cited by-同舟云学术

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FEM simulation of SAW H₂ gas sensor based on Pd/AlN/Si multilayer structure

Published:2023-11-27 Issue: Volume:30 Page:145-150
ISSN:
Container-title:2023 12th International Conference on Control, Automation and Information Sciences (ICCAIS)
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Author:

Nguyen Hai Ha¹,Nguyen Hung Vy²,Nguyen Minh Hieu²,Dong Nhan Hiep³,Hoang Si Hong²

Affiliation:

1. Hanoi University of Science and Technology Hung Yen of Education and Technology,School of Electrical and Electronic Engineering,Hanoi,Vietnam

2. Hanoi University of Science and Technology,School of Electrical and Electronic Engineering,Hanoi,Vietnam

3. Hanoi Open University,Department of Electrical - Electronics Engineering,Hanoi,Vietnam

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10382256/10382242/10382243.pdf?arnumber=10382243

Reference27 articles.

1. Surface acoustic wave devices for sensor applications

2. Enhanced NO2 sensitivity of SnO2 SAW gas sensors by facet engineering

3. Enhanced sensitivity of langasite-based surface acoustic wave CO gas sensor using highly porous Ppy@PEDOT:PSS hybrid nanocomposite

4. Nanostructured Silicon-Based Surface Acoustic Wave Sensor for CO₂ Gas Detection

5. Strategies for Giant Mass Sensitivity Using Super-High-Frequency Acoustic Waves

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