Implementation of a simulation-based short-term lot arrival forecast in a mature 200mm semiconductor FAB
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx5/6135535/6147014/06147907.pdf?arnumber=6147907
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Backward Simulation: A Customer-Focused Diversification of Fab Simulation Applications in a Highly Automated Semiconductor Production Line;2023 Winter Simulation Conference (WSC);2023-12-10
2. Graph Representation and Embedding for Semiconductor Manufacturing Fab States;2022 Winter Simulation Conference (WSC);2022-12-11
3. Work in Progress Level Prediction with Long Short-Term Memory Recurrent Neural Network;Procedia Manufacturing;2021
4. Challenges Associated with Realization of Lot Level Fab Out Forecast in a Giga Wafer Fabrication Plant;2020 Winter Simulation Conference (WSC);2020-12-14
5. Incoming Work-In-Progress Prediction in Semiconductor Fabrication Foundry Using Long Short-Term Memory;Computational Intelligence and Neuroscience;2019-01-02
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