Nonvolatile Silicon MEMS Optical Switch Based on Bistable Mechanical Beams
Author:
Affiliation:
1. Zhejiang University,College of Optical Science and Engineering,Hangzhou,China
Funder
Research and Development
Natural Science Foundation of Zhejiang Province
Startup Foundation
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10209604/10209571/10209727.pdf?arnumber=10209727
Reference6 articles.
1. Bistable silicon photonic MEMS switches
2. Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers;wu;Optica,2016
3. A centrally-clamped parallel-beam bistable MEMS mechanism
4. Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch
5. Theoretical Analysis of Mechanical-Contact-Based Submicron-Si-Waveguide Optical Microswitch at Telecommunication Wavelengths
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