Rapid Thermal Treatment for Improving Thermal Processing Stability of Ar-Implanted Surface Passivated High-Resistivity Silicon
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Published:2011-07
Issue:7
Volume:21
Page:365-367
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ISSN:1531-1309
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Container-title:IEEE Microwave and Wireless Components Letters
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language:
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Short-container-title:IEEE Microw. Wireless Compon. Lett.
Author:
Liu Chih-Yi,Weng Min-Hang,Lin Jyun-Min
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Condensed Matter Physics