Modelling and Control of a Parametric Wafer Manufacturing Process-Reference-Cited by-同舟云学术

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Modelling and Control of a Parametric Wafer Manufacturing Process

Published:2023-11-22 Issue: Volume: Page:724-730
ISSN:
Container-title:2023 15th IEEE International Conference on Industry Applications (INDUSCON)
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Author:

Koumboulis Fotis N.¹,Fragkoulis Dimitrios G.¹,Mparkas Dimitrios²

Affiliation:

1. School of Science, National and Kapodistrian University of Athens,Robotics, Automatic Control and Cyber-Physical Systems Laboratory,Department of Digital Industry Technologies,Euripus Campus,Greece,34400

2. National and Kapodistrian University of Athens,Core Department,Euripus Campus,Greece,34400

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10374478/10374482/10375009.pdf?arnumber=10375009

Reference17 articles.

1. Throughput Analysis of Linear Cluster Tools

2. Aggregative Synthesis of Distributed Supervisors Based on Automaton Abstraction

3. Maximally permissive coordinated distributed supervisory control of nondeterministic discrete-event systems

4. The Synthesis of Time Optimal Supervisors by Using Heaps-of-Pieces

5. Coordinated distributed time optimal supervisory control

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