Affiliation:
1. Inst for Microelectron., Tech. Univ., Vienna, Austria
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
21 articles.
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2. Process Simulation;Springer Handbook of Semiconductor Devices;2022-11-11
3. Analytical Models for Three-Dimensional Ion Implantation Profiles in FinFETs;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2013-12
4. Front-end process modeling in silicon;The European Physical Journal B;2009-11-07
5. Monte Carlo Analysis;Encyclopedia of RF and Microwave Engineering;2005-04-15