Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids-Reference-Cited by-同舟云学术

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Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids

Published:1997 Issue:4 Volume:6 Page:337-346
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Luginbuhl P.,Collins S.D.,Racine G.-A.,Gretillat M.-A.,De Rooij N.F.,Brooks K.G.,Setter N.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx4/84/14164/00650131.pdf?arnumber=650131

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