Author:
Chen Huang-yu,Chang Yao-wen
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Computer Science Applications
Cited by
7 articles.
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3. Minimization of Flare in EUVL by Simultaneous Wire Segment Perturbation and Dummification;2019 IEEE Computer Society Annual Symposium on VLSI (ISVLSI);2019-07
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