Closed Loop Sense Feedback Control for a Dual Proof Mass MEMS Vibratory Gyroscope
Author:
Affiliation:
1. Indian Institute of Technology Hyderabad,Department of Mechanical and Aerospace Engineering,Telangana,India,502284
2. Research Center Imarat Hydereabad,Telangana,India,500069
Funder
DRDO, New Delhi, India
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx8/10613004/10613044/10613252.pdf?arnumber=10613252
Reference12 articles.
1. In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection
2. Modeling and simulation of MEMS gyroscope with Matlab/SIMULINK package;Nazdrowicz;Int. J. Microelectron. Comput. Sci.,2017
3. Theory and error analysis of vibrating-member gyroscope
4. Parametric Tuning of Natural Frequencies of Tuning Fork Gyroscope
5. Design and Experiment for Dual-Mass MEMS Gyroscope Sensing Closed-Loop System
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