Fabrication and Electromechanical Characterization of Silicon Nanomechanical Membrane Flexure MEMS Sensor for Gas Sensing Applications
Author:
Affiliation:
1. Department of Avionics, Indian Institute of Space Science and Technology, Thiruvananthapuram, India
Funder
Science and Engineering Research Board
IIST Department of Space (DoS), Government of India
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Link
http://xplorestaging.ieee.org/ielx7/7361/10453373/10400198.pdf?arnumber=10400198
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