Design and Implementation of a Novel Membrane-Island Structured MEMS Accelerometer With an Ultra-High Range-Reference-Cited by-同舟云学术

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Design and Implementation of a Novel Membrane-Island Structured MEMS Accelerometer With an Ultra-High Range

Published:2022-11-01 Issue:21 Volume:22 Page:20246-20256
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Zhang Jie¹,Shi Yunbo¹^ORCID,Cao Huiliang¹^ORCID,Zhao Sihan²,Zhao Yongqi³,Wang Yanlin⁴,Zhao Rui¹^ORCID,Hou Xiaojuan¹,He Jian¹^ORCID,Chou Xiujian¹

Affiliation:

1. Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, China

2. Shanghai Aerospace Control Technology Institute, Shanghai, China

3. Shanghai Precision Metrology and Test Research Institute, Shanghai, China

4. Xi’an Institute of Electromechanical Information Technology, Xi’an, China

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Key Research and Development (R&D) Projects of Shanxi Province

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/9933390/09851608.pdf?arnumber=9851608

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1. Integrated package and calibration of high-g MEMS ASIC acceleration sensor;Measurement;2025-01

2. Development of a MEMS Piezoresistive High-g Accelerometer with a Cross-Center Block Structure and Reliable Electrode;Sensors;2024-08-27

3. Temperature Compensation for MEMS Accelerometer Based on a Fusion Algorithm;Micromachines;2024-06-27

4. A Comprehensive Review on Low-Cost MEMS Accelerometers for Vibration Measurement: Types, Novel Designs, Performance Evaluation, and Applications;Journal of Molecular and Engineering Materials;2024-05-25

5. Sensitivity Matrix Calibration of Triaxial High-G Accelerometer Based on Triaxial Shock Calibration Device;IEEE Sensors Journal;2024-04-01

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