Reducing the Sensitivity of Fabrication Error in the MEMS Butterfly Gyroscope by Adopting an Improved Vibration Beam
Author:
Affiliation:
1. College of Intelligence Science and Technology, National University of Defense Technology, Changsha, China
Funder
National Key Research and Development Program of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/10068826/10040619.pdf?arnumber=10040619
Reference21 articles.
1. 0.00016 deg/√hr Angle Random Walk (ARW) and 0.0014 deg/hr Bias Instability (BI) from a 5.2M-Q and 1-cm Precision Shell Integrating (PSI) Gyroscope
2. Overview and analysis of MEMS Coriolis vibratory ring gyroscope
3. Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions
4. Effect of Electrode Design on Frequency Tuning in Shell Resonators
5. A quadrature compensation method to improve the performance of the butterfly vibratory gyroscope
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Monolithic Integrated Interface ASIC With Quadrature Error Correction for MEMS Dual-Mass Vibration Gyroscope;IEEE Sensors Journal;2024-06-01
2. Design of an interface circuit system for mode-separation MEMS digital gyroscope;Modern Physics Letters B;2023-12-12
3. Adaptive Fuzzy Modal Matching of Capacitive Micromachined Gyro Electrostatic Controlling;Sensors;2023-08-25
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3