Enhancing the Performance of Piezoelectric Micromachined Ultrasonic Transducers Using C Slots
Author:
Affiliation:
1. Department of Electrical and Computer Engineering, Babol Noshirvani University of Technology, Babol, Iran
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/10235271/10115244.pdf?arnumber=10115244
Reference24 articles.
1. Modeling, Fabrication, and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers
2. CMOS-compatible AlN piezoelectric micromachined ultrasonic transducers
3. Zero-Bending Piezoelectric Micromachined Ultrasonic Transducer (pMUT) With Enhanced Transmitting Performance
4. Fabrication of a two-dimensional piezoelectric micromachined ultrasonic transducer array using a top-crossover-to-bottom structure and metal bridge connections
5. Bimorph Piezoelectric Micromachined Ultrasonic Transducers
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