Affiliation:
1. Micro Engineering and Micro Systems Laboratory (JML), School of Mechanical and Aerospace Engineering, Jilin University, Changchun, China
Funder
National Natural Science Foundation of China
Jilin Natural Science Foundation
Special Fund for Basic Scientific Research of the Central Universities
Scientific Research Foundation for Leading Professor Program of Jilin University
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation