A 130dB SPL 72dB SNR MEMS Microphone Using a Sealed-Dual Membrane Transducer and a Power-Scaling Read-Out ASIC

Author:

Sant Luca1ORCID,Fuldner Marc2,Bach Elmar1,Conzatti Francesco1,Caspani Alessandro1,Gaggl Richard1,Baschirotto Andrea3ORCID,Wiesbauer Andreas1

Affiliation:

1. Infineon Technologies Austria, Villach, Austria

2. Infineon Technologies Neubiberg, Neubiberg, Germany

3. Department of Physics, University of Milano-Bicocca, Milan, Italy

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Cited by 21 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. A 22-dBA Digital Optical MEMS Microphone;IEEE Journal of Solid-State Circuits;2024-07

2. A 1.5 V 132 dBSPL AOP Digital Readout Circuit for MEMS Microphone Using Self-Adaption Loop;2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits);2024-06-16

3. A 1.2V, 0.25%/V, 50ppm/°C, 1% Precision, 500kHz Relaxation Oscillator in 55nm CMOS;2024 19th Conference on Ph.D Research in Microelectronics and Electronics (PRIME);2024-06-09

4. A behavioral nonlinear modeling implementation for MEMS capacitive microphones;Sensors and Actuators A: Physical;2024-06

5. The Effect of Compliant Backplate on Capacitive MEMS Microphones;IEEE Sensors Journal;2024-06-01

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