An Ultrasensitive Low-to-Medium Vacuum Pressure Sensor Using a Resonant Microstructure-Reference-Cited by-同舟云学术

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An Ultrasensitive Low-to-Medium Vacuum Pressure Sensor Using a Resonant Microstructure

Published:2024-08-01 Issue:15 Volume:24 Page:23520-23526
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Alcheikh Nouha¹^ORCID,Ben Mbarek Sofiane²,Younis Mohammad I.³^ORCID

Affiliation:

1. Department of Mechanical and Nuclear Engineering, Khalifa University of Science and Technology, Abu Dhabi, United Arab Emirates

2. School of Mathematics and Physics, Queen’s University Belfast, Belfast, U.K.

3. Division of Physical Sciences and Engineering, King Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia

Funder

Khalifa University of Science and Technology

King Abdullah University of Science and Technology

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx8/7361/10617804/10562254.pdf?arnumber=10562254

Reference41 articles.

1. End-user perspective of low-cost sensors for outdoor air pollution monitoring

2. Design and applications of MEMS flow sensors: A review

3. Highly conductive, washable and super-hydrophobic wearable carbon nanotubes e-textile for vacuum pressure sensors

4. A Low-Cost, Nanowatt, Millimeter-Scale Memristive-Vacuum Sensor

5. MOF‐Based Chemiresistive Gas Sensors: Toward New Functionalities (Adv. Mater. 43/2023)

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