1. State Key Laboratory for Manufacturing Systems Engineering, the International Joint Laboratory for Micro/Nanomanufacturing and Measurement Technologies, Overseas Expertise Introduction Center for Micro/Nanomanufacturing and Nanomeasurement Technologies Discipline Innovation, and the School of Mechanical Engineering, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an, China
2. College of Mechanical and Electrical Engineering, Shaanxi University of Science and Technology, Xi’an, China
3. Integrated Circuits Laboratory, School of Engineering, Institute of Microengineering, École Polytechnique Fédérale de Lausanne, Neuchâtel, Switzerland