Highly Sensitive Mass Sensing Scheme via Energy Relocalization With a Coupled Three-Beam Array-Reference-Cited by-同舟云学术

Highly Sensitive Mass Sensing Scheme via Energy Relocalization With a Coupled Three-Beam Array

Published:2022-10-01 Issue:19 Volume:22 Page:18400-18408
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Liu Shuyi¹,Wang Dong F.¹^ORCID,Maeda Ryutaro²^ORCID

Affiliation:

1. Micro Engineering and Micro Systems Laboratory (JML), School of Mechanical and Aerospace Engineering, Jilin University, Changchun, China

2. Research Center for Ubiquitous Micro-Electro-Mechanical System (MEMS) and Micro Engineering, National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan

Funder

National Natural Science Foundation of China

Free Exploration Key Project of Jilin Nature Science Foundation

Scientific Research Foundation for Leading Professor Program of Jilin University

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/9906561/09863738.pdf?arnumber=9863738

Reference48 articles.

1. Internal Resonance Phenomena in Coupled Ductile Cantilevers With Triple Frequency Ratio–Part I: Experimental Observations

2. Oscillation in coupled resonator systems: Part IV - study on 1:3 internal resonance applicable to sensor devices of high sensitivity

3. Coherent phonon manipulation in coupled mechanical resonators

4. Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation

5. Exploiting nonlinearity to enhance the sensitivity of mode-localized mass sensor based on electrostatically coupled MEMS resonators

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