A Novel Transient PDE Model for Development of Highly Sensitive Microthermal Expansion-Based Angular Motion Sensor-Reference-Cited by-同舟云学术

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A Novel Transient PDE Model for Development of Highly Sensitive Microthermal Expansion-Based Angular Motion Sensor

Published:2024-03-15 Issue:6 Volume:24 Page:8045-8053
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Luo Huahuang¹^ORCID,Cabot Jose²,Wang Xiaoyi³^ORCID,Duan Mingzheng²^ORCID,Xu Wei⁴^ORCID,Ke Qingqing¹,Lee Yi-Kuen²^ORCID

Affiliation:

1. School of Microelectronics Science and Technology, Sun Yat-sen University (SYSU), Zhuhai, China

2. Department of Mechanical and Aerospace Engineering, The Hong Kong University of Science and Technology (HKUST), Hong Kong, China

3. School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing, China

4. College of Electronics and Information Engineering, Shenzhen University, Shenzhen, China

Funder

Basic and Applied Basic Research Foundation of Guangdong Province

Guangdong Province International Science and Technology Cooperation Research Project

Hong Kong Center for Construction Robotics

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/7361/10472410/10414379.pdf?arnumber=10414379

Reference36 articles.

1. Micromachined inertial sensors

2. Advances in Gyroscope Technologies

3. Gyroscope Technology and Applications: A Review in the Industrial Perspective

4. Research status and development trend of high-precision MEMS gyroscope;Xi;Scientia Sinica Technologica,2023

5. A vibratory micromechanical gyroscope

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