Research of a Compact MEMS-Based Integrated Detector for X-Band Application: Theory, Design, Fabrication, and Measurement
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Published:2021-11-15
Issue:22
Volume:21
Page:25668-25674
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ISSN:1530-437X
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Container-title:IEEE Sensors Journal
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language:
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Short-container-title:IEEE Sensors J.
Author:
Yan HaoORCID,
Liao XiaopingORCID
Funder
National Natural Science Foundation of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Cited by
1 articles.
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