1. School of Microelectronics, Southern University of Science and Technology, Shenzhen, China
2. Key Laboratory of Optoelectronic Devices and Systems of the Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen, China
3. Foshan Electrical and Lighting Company Ltd., Foshan, China
4. School of Microelectronics, the Engineering Research Center of Integrated Circuits for Next-Generation Communications, Ministry of Education, and the Engineering Research Centerof Three Dimensional Integration in Guangdong Province, Southern University of Science and Technology, Shenzhen, China