High-Temperature, Wide-Range, and Fast-Response Thin-Film Anemometer Based on Plasma of Glow Discharge

Author:

Chen Qinnan1ORCID,Wei Hongcheng1,Liu Xianlong2ORCID,Xu Yi3,Li Xin4,Zhang Peng1,Hai Zhenyin1ORCID,Wu Dezhi1,Zhao Yang1,Liu Kun5ORCID,Sun Daoheng1ORCID

Affiliation:

1. Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, China

2. School of Microelectronics, Southern University of Science and Technology, Shenzhen, China

3. Sichuan Gas Turbine Research Institute of AECC, Chengdu, China

4. College of Mechanical and Electrical Engineering, Lingnan Normal University, Zhanjiang, China

5. Key Laboratory of Optoelectronics Information Technology, School of Precision Instruments and Optoelectronics Engineering, Tianjin University, Tianjin, China

Funder

National Key Research and Development Program of China

Science, Technology, and Innovation Commission of Shenzhen Municipality

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

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