A Novel Dual-Differential Edge Sensor Based on the Eddy Current Effect
Author:
Affiliation:
1. Department of Precision Machinery and Precision Instruments, University of Science and Technology of China, Hefei, China
2. Nanjing Institute of Astronomical Optics and Technology, National Astronomical Observatories, CAS, Nanjing, China
Funder
National Natural Science Foundation of China
Natural Science Research Project of Anhui Province
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/10068826/10035018.pdf?arnumber=10035018
Reference27 articles.
1. Inductive sensors based on embedded coil technology for nanometric inter-segment position sensing of the E-ELT;wasmeier;Proc SPIE,2014
2. Design Strategies for Eddy-Current Displacement Sensor Systems: Review and Recommendations
3. Measuring in the Subnanometer Range: Capacitive and Eddy Current Nanodisplacement Sensors
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