Affiliation:
1. Smart Microsensors and Microsystems Engineering Research Center, Ministry of Education, College of Electronics and Information, Hangzhou Dianzi University, Hangzhou, China
2. Zhejiang Tsinghua Institute of Flexible Electronics Technology, Jiaxing, Nanhu, China
Funder
National Natural Science Foundation of China
Key Research and Development Plan Project of Zhejiang Province
Key Laboratory Fund Project of Science and Technology on Micro-System Laboratory
Manufacturing Basic Technology and Key Components National Key Research and Development Program of China
Zhejiang Provincial Natural Science Foundation of China
Scientific Research Project of Zhejiang Provincial Department of Education
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Cited by
4 articles.
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