All-Silicon Packaging Technology for Fiber Bragg Gratings and Its Application in Tilt Sensor-Reference-Cited by-同舟云学术

All-Silicon Packaging Technology for Fiber Bragg Gratings and Its Application in Tilt Sensor

Published:2022-12-01 Issue:23 Volume:22 Page:22627-22636
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Huang Liqi¹,Xiong Li¹^ORCID,Guo Yongxing²^ORCID,Hu Zhongchun³

Affiliation:

1. Key Laboratory of Metallurgical Equipment and Control Technology, Ministry of Education, Precision Manufacturing Institute, Wuhan University of Science and Technology, Wuhan, China

2. Key Laboratory of Metallurgical Equipment and Control Technology, Ministry of Education, and the Hubei Key Laboratory of Mechanical Transmission and Manufacturing Engineering, Wuhan University of Science and Technology, Wuhan, China

3. Shandong Key Laboratory of Inorganic Functional Materials and Intelligent Manufacturing, Zaozhuang, China

Funder

National Natural Science Foundation of China

Project of China Postdoctoral Science Foundation

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/9966666/09923600.pdf?arnumber=9923600

Reference30 articles.

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4. Static mechanical characteristics of tin-coated fiber Bragg grating sensors

5. Side-polished fiber Bragg grating hydrogen sensor with WO_3-Pd composite film as sensing materials