Affiliation:
1. Department of Micro/Nano-Electronics, National Key Laboratory of Advanced Micro and Nano Manufacture Technology and Collaborative Innovation Center of IFSA, Shanghai Jiao Tong University, Shanghai, China
2. National Key Laboratory of Advanced Micro and Nano Manufacture Technology, Shanghai Jiao Tong University, Shanghai, China
Funder
Scientific and Technological Innovation (STI) 2030-Major Projects
National Key Research and Development Program
Fundamental Research Funds for the Central Universities
Strategic Priority Research Program of Chinese Academy of Sciences
National Natural Science Foundation of China
Shanghai Municipal Science and Technology Major Project
Shanghai Pilot Program for Basic Research—Shanghai Jiao Tong University
Shanghai Jiao Tong University (SJTU) Trans-med Award
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Cited by
5 articles.
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