An Improved Static Membrane Deflection Analysis for Collapse Mode CMUT Fabricated by Sacrificial Release Method-Reference-Cited by-同舟云学术

An Improved Static Membrane Deflection Analysis for Collapse Mode CMUT Fabricated by Sacrificial Release Method

Author:

Wang Jiujiang¹^ORCID,Liu Xin²^ORCID,Yu Yuanyu²^ORCID,Cheng Ching-Hsiang³^ORCID,Lei Kin Fong⁴^ORCID,Mak Peng Un⁵^ORCID,Vai Mang I²,Pun Sio Hang²^ORCID

Affiliation:

1. School of Artificial Intelligence, Neijiang Normal University, Neijiang, China

2. State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China

3. School of Automotive Engineering, Wuhan University of Technology, Hubei, China

4. Graduate Institute of Boimedical Engineering, Chang Gung University, Taoyuan, Taiwan

5. Department of Electrical and Computer Engineering, Faculty of Science and Technology, University of Macau, Macau, China

Funder

National Key Research and Development Program of China

Sichuan Science and Technology Program

Shenzhen-Hong Kong-Macau S&T Program (Category C) of Shenzhen Science and Technology Innovation Committee

University of Macau

Science and Technology Development Fund, Macau SAR

Foundation of Ph.D. Scientific Research of Neijiang Normal University

Innovative Team Program of the Neijiang Normal University

Sichuan Province Academic and Technical Leader Training Funded Projects

Science and Technology Program of SiChuan

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

Reference57 articles.