Simulation and Optimization of Surface Acoustic Wave Devices With High Electromechanical Coupling Factor and Zero Temperature Coupling Coefficient by Pattern Piezoelectric Layer-Reference-Cited by-同舟云学术

Simulation and Optimization of Surface Acoustic Wave Devices With High Electromechanical Coupling Factor and Zero Temperature Coupling Coefficient by Pattern Piezoelectric Layer

Published:2023-05-15 Issue:10 Volume:23 Page:10597-10604
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Dun Hongyu¹,Han Xu¹,Wang Fang¹^ORCID,Nie Weican¹,Yang Zuodong¹,Zhou Lintao¹,Zhang Fengpu¹,Sun Han¹,Han Yemei¹,Kong Deqing²,Zhang Kailiang¹^ORCID

Affiliation:

1. Tianjin Key Laboratory of Film Electronic and Communication Devices, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin, China

2. Muroran Institute of Technology, Hokkaido, Muroran, Japan

Funder

Science and Technology Planning Project of Tianjin City

Research and Development Program in Significant Area of Guangdong Province

Tianjin University of Science and Technology 2022 University-Level Postgraduate Research Innovation Practice Project

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/10124342/10101774.pdf?arnumber=10101774

Reference35 articles.

1. FEM modeling SAW humidity sensor based on ZnO/IDTs/AlN/Si structures

2. FEM simulation of Rayleigh waves for SAW devices based on ZnO/AlN/Si

3. Characteristics of one-port surface acoustic wave resonator fabricated on ZnO/6H-SiC layered structure

4. Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO2/IDT/LiNbO3/Diamond/Si

5. Laser-grown ZnO nanowires for room-temperature SAW-sensor applications