A Double Differential Torsional Accelerometer With Higher Than 10-kHz Measurement Bandwidth for Vibration Monitoring-Reference-Cited by-同舟云学术

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A Double Differential Torsional Accelerometer With Higher Than 10-kHz Measurement Bandwidth for Vibration Monitoring

Published:2023-06-01 Issue:11 Volume:23 Page:11437-11443
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Hou Zhanqiang¹^ORCID,Liu Gao¹,Miao Tongqiao¹,Feng Jun¹^ORCID,Xiao Dingbang¹^ORCID,Wu Xuezhong¹

Affiliation:

1. College of Intelligence Science and Technology, National University of Defense Technology, Changsha, China

Funder

Major Project of Natural Science Foundation of Hunan Province

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/10139852/10105901.pdf?arnumber=10105901

Reference16 articles.

1. A Wideband, Low-Noise Accelerometer for Sonar Wave Detection

2. Effect of vacuum packaging on bandwidth of push–pull type capacitive accelerometer structure

3. An All-Silicon Process Platform for Wafer-Level Vacuum Packaged MEMS Devices

4. A high-precision, wide-bandwidth micromachined tunneling accelerometer

5. High-G and High-Bandwidth Bulk Acoustic Wave (BAW) Accelerometers Using a Metal-Less AlN-HARPSS Process With 95 nm Gaps

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1. A MEMS resonant vacuum gauge for high vacuum measurement;Vacuum;2024-10

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