Mechanical stress as a function of temperature in aluminum films-Reference-Cited by-同舟云学术

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Mechanical stress as a function of temperature in aluminum films

Published:1988 Issue:12 Volume:35 Page:2160-2169
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Gardner D.S.,Flinn P.A.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx1/16/449/00008790.pdf?arnumber=8790

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