Electrical Degradation and Recovery of Low-Temperature Polycrystalline Silicon Thin-Film Transistors in Polycrystalline Silicon Plasma Process-Reference-Cited by-同舟云学术

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Electrical Degradation and Recovery of Low-Temperature Polycrystalline Silicon Thin-Film Transistors in Polycrystalline Silicon Plasma Process

Published:2011-08 Issue:8 Volume:58 Page:2448-2455
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Chang Jiun-Jye,Chang-Liao Kuei-Shu,Wang Tien-Ko,Wu Yung-Chun,Lin Kao-Chao,Chen Chia-Yu,Chen Yu-Mou,Tseng Jen-Pei,Hung Min-Feng

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx5/16/5959271/05783902.pdf?arnumber=5783902

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electrical Degradation and Recovery of Low-Temperature Polycrystalline-Silicon Thin-Film Transistors With Various Metal Gate Patterns;IEEE Transactions on Electron Devices;2012-12

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