High-performance, cost-effective 2z nm two-deck cross-point memory integrated by self-align scheme for 128 Gb SCM

Author:

Kim Taehoon,Choi Hyejung,Kim Myoungsub,Yi Jaeyun,Kim Donghoon,Cho Sunglae,Lee Hyunmin,Hwang Changyoun,Hwang Eung-Rim,Song Jeongho,Chae Sujin,Chun Yunseok,Kim Jin-Kook

Publisher

IEEE

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